Auburn, MA, - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for nanotechnology, photonics, semiconductor and life science applications, introduces the world's first fully-integrated hybrid Z-nanopositioning system employing piezoelectric and DC-motor drives. The M-714 precision Z-stage / C-702 Hybrid Controller combine the well-known piezo drive advantages of unlimited resolution and very fast response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement.

Typical Applications Metrology, Surface Inspection, Microscopy, Laser Technology, Interferometry

Features & Advantages + 2 Nanometer Linear Encoder Resolution + Active Compensation of Stick/Slip During Startup and Settling + Active Backlash Compensation + Excellent Velocity Control + Millisecond Settling to Nanometer Accuracy + Reliable Execution of Nanometer Level Increments + 7 mm (1/4 inch) Vertical Travel Range + High Holding Forces with Minimum Power Consumption + 10 kg (22 lbs) Vertical Load Capacity + No Counterbalance Mechanism Required

Hybrid Controller Technology is Key to Success The highly specialized C-702 Hybrid Controller reads the stage position from an integrated, 2 nm precison linear encoder and continuously actuates both the piezoelectric and servo motor drives in a way to provide the best possible overall performance. Due to their instantaneous, sub-millisecond response, the integrated piezo actuators provide active stick/slip compensation during startup and settling. They also improve velocity control and positioning performance when nanometer level steps need to be executed. Novel High-Bandwidth Encoder Interface, Realtime Operating System The C-702 Hybrid controller is equipped with a novel high-speed encoder interface and can handle encoder count rates of 100 million pulses per second. Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user. Interface to the host computer is via TCP/IP or RS-232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet).

100 mm Translation Stage also Available A 100 mm hybrid translation stage is also available.

Download Datasheet: http://www.physikinstrumente.com/en/pdf/PI_Hybrid.pdf

More about Hybrid Precision Positioning Tables http://www.physikinstrumente.com/en/news/fullnews.php?newsid=105

More about Nanopositioning http://www.nanopositioners.com