| Actuator Configuration |
Rectangular Stage |
| Type |
Direct |
| Maximum Displacement (µm) |
700 |
| Stiffness (N/µm) |
0.1300 |
| Resonance Frequency (kHz) |
0.3800 |
| Notes |
Tilt to 0.7 degrees or 12 mRad, non-magnetic stainless steel design |
| Abstract |
The P-287 is a high-resolution, Notes piezoelectrically driven flexure See the "Selection Guide" on stage providing tilt up to 12 p. 2-14 ff . for comparison with mrad and vertical travel up to other nanopositioning systems. 700 µm at the tip. A ball seat is
machined into the tip to decou-
ple any rotation if the P-287 is
used as a linear drive. In that
case an external guiding sys- P-287.70 dimensions (in mm) tem is recommended (e.g. fric-
tionless diaphragm spring).
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| View Entire Datasheet |
