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Piezo Flexure NanoPositioner & Scanner -- P-762.3L Piezoelectric Devices Data Sheets PI (Physik Instrumente) L.P.


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Piezo Flexure NanoPositioner & Scanner -- P-762.3L
SPECIFICATIONS View Entire Datasheet
Device Type Actuator
Length (mm) 80.00
Diameter/Height (mm) 15.00
Mass (g) 850
Notes 10mRad tilt, XYZ positioning stage
Abstract The XYZ version consists of an former) position feedback sen- XY module stacked together sors provide nanometer-scale with a Z module. resolution and stability in The XYZ version consists closed-loop operation (with PI X Y of the XY module stacked electronics). together with a Z module. X Y P-762.1L, Flexure NanoPositioner
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